Iindaba zeShishini: I-PVA TePla kunye neFraunhofer IISB baseka iJoint Lab ye-aluminium nitride substrates

I-Fraunhofer IISB (Institute for Integrated Systems and Device Technology) ese-Erlangen kunye nomenzi weenkqubo zeplasma ze-microwave kunye nerediyo i-PVA TePla AG ese-Wettenberg bahlanganisa ubuchule babo kwi-Joint Lab yokuvelisa iikristale ze-aluminium nitride (AlN).

Njengokuqala eYurophu, olu budlelwane luvumela ukuveliswa kwemveliso encinci ye-monocrystalline AlN substrates enobubanzi obuzii-intshi ezi-2 ngeenjongo zophando nophuhliso. Oku kuphucula kakhulu ukufumaneka kwe-AlN substrates eYurophu, nto leyo ekhawulezisa uphuhliso lwezixhobo neenkqubo ezisekelwe kwi-AlN kunye notshintsho lwazo kwizicelo zoshishino.

I-aluminium nitride yenye yezona zinto zithembisayo kwisizukulwana esilandelayo se-electronics ezisebenza kakuhle. Njenge-ultrawide-bandgap (UWBG) semiconductor, i-AlN ivula amathuba amatsha kwi-photonics, kwi-electronics zamandla, kwi-electronics ezisebenza rhoqo, nakwi-electronics ezisebenza phantsi kweemeko ezinzima. Ukuza kuthi ga ngoku, ukunqongophala kwe-AlN substrates ezikumgangatho ophezulu, ezinkulu nezingabizi kakhulu kuye kwathintela uphuhliso lweenkqubo ze-elektroniki ezisekelwe kwi-AlN.

“NgeJoint Lab, sibeka isiseko sokuqinisekisa ukubonelelwa okuthembekileyo kwezixhobo ze-AlN ezivela eYurophu, ngaloo ndlela sivula amathuba amatsha kwisizukulwana esilandelayo sezixhobo ze-AlN ezisebenza kakuhle,” utshilo uGqr. Sven Besendörfer, inkokeli yeqela lezixhobo ze-nitride kwaye enoxanduva lophuhliso lwezinto ze-AlN kwiFraunhofer IISB. “Sikunye nePVA TePla, sinegalelo kubuchule bethu ekukhuleni kwekristale yemizi-mveliso, ngaloo ndlela sidala izinto ezifunekayo ukuze kudluliselwe kwizicelo zekhonkrithi.”

Itekhnoloji yezixhobo eziqinisekisiweyo ihlangabezana nolwazi oluyimfihlo lwenkqubo

Kwilabhoratri edibeneyo, iFraunhofer IISB isebenzisa ubuchwepheshe bayo benkqubo yePVT (uthutho lomphunga oluphathekayo) ukuvelisa iikristale ze-AlN eziziisentimitha ezi-2. Kule nkqubo, umgubo we-AlN uphehlwa kwi-crucible kumaqondo obushushu angaphezulu kwama-2000°C kwaye ubekwe kwikristale yembewu. I-PVA TePla ibonelela ngeenkqubo ze-PVT kule njongo, esele zisetyenziswa kwihlabathi liphela kwiikristale ze-silicon carbide (SiC) eziziisentimitha ezi-8 ububanzi kwaye ngoku zilungiselelwe ngokukodwa ukukhula kweekristale ze-AlN eziziisentimitha ezi-2.

Ngenxa yobuchule benkqubo obunikelwe yiFraunhofer IISB, iqela le-PVA TePla lakwazi ngokukhawuleza ukuvelisa iikristale ze-AlN ezikumgangatho ofanayo kwizakhiwo zalo. I-Joint Lab igxile kwimveliso encinci ezinzileyo yeekristale ze-AlN ezi-2-intshi. Imveliso ngoku inyuswa kancinci kancinci ukuze kuphuculwe uzinzo lwenkqubo, ukuphinda ivelise, isivuno kunye nezakhiwo zeendleko.

“Nge-aluminium nitride, sibumba isizukulwana esilandelayo sobuchwepheshe esilandela iSiC,” utshilo uGqr. Jan Pfeiffer, usekela-mongameli we-R&D kwi-PVA TePla. “NgeJoint Lab, singadibanisa ngokuthe ngqo ubuchule bethu bezixhobo nolwazi lwenkqubo yeFraunhofer IISB, nto leyo esenza sikwazi ukubonelela ngezisombululo ezijolise kwimarike kubathengi bethu behlabathi kwinqanaba lokuqala,” wongeza. “Injongo yethu efanayo kukukhuthaza uphuhliso lwemarike kwicandelo le-AlN ngokusebenzisa ii-substrates ezifanelekileyo kunye nokuxhasa iinkampani ezifuna ukungena kweli candelo njengamaqabane etekhnoloji nezixhobo ezifanelekileyo kunye nobuchule benkqubo obuhambelanayo.”

Ukuqinisa ulawulo lobuchwepheshe baseYurophu ngokusebenzisa ukwandiswa kwemizi-mveliso

Iikristale ze-AlN eziveliswa kwiJoint Lab zicutshungulwa ngakumbi kwiFraunhofer IISB zibe ziisubstrates ze-AlN ezilungele i-epi kwaye, ngokusebenzisa inkampani yophando nophuhliso lwemveliso ese-Erlangen i-LZE GmbH, ngokukodwa zidluliselwe kwiinkqubo zophuhliso lwemizi-mveliso kunye nokwandisa. “Kumandla e-semiconductor eYurophu, kubalulekile ukuba izixhobo ezintsha ezibalulekileyo zingaphuhliswa kuphela kodwa zidluliselwe ngokukhawuleza kwizicelo zoshishino kunye nokudalwa kwexabiso elinokwandiswa,” utshilo umlawuli ophetheyo we-LZE uGqr Christian Forster. “Ngemakethi yayo yetekhnoloji entsha, i-LZE GmbH ibonelela iinkampani kunye namaziko ophando ngokufikelela okukhethekileyo kwihlabathi liphela kwisubstrates ze-AlN. Ngale ndlela, sinceda ekuqinisekiseni ukuba izicelo ezithembisayo zeemarike zoshishino eziphezulu ziziswa kwimarike ngokukhawuleza.”